For the technical realization
of low-pressure plasma processes, one requires equipment with the following
components:
- vacuum system (pump, vessel)
- energy supply
- gas supply
- measurement and control components for the reproducible adjustment of the process parameter
Due to the necessity
of a vacuum system in most cases, batch operation method is the easiest
solution. The processes can be flexibly and complexly configured, in order
to change
the mode of
action of the plasma through variation of the process parameters
(pressure, gas flow, gas composition, power) and can attain different effects
in one process step. So that, i.e. without great expenditure a secondary
cleaning can be carried out and immediately thereafter a corrosion protection
layer becomes deposited, without having to aerate in between.
Further advantages of low-pressure
plasma technique:
- ability of fissure-penetration by the plasma: even most complex sample geometries up to porous substrates can be treated
- no thermal or mechanical strain of the substrates
- high measure on environmental compatibility and operational safety
Within the bounds of its function as service provider in technology transfer, IFAM offers its resources for the processing of the above-mentioned industrial questions up to series production. Our service comprises consultation, process development, sampling and industrial installation through pilot terotechnology.
Contact: